Structure and Dielectric Study of Poly(α,α difluoro‐p‐xylylene) Thin Films: Highlight of the Substrate Temperature Effect
Identifieur interne : 000400 ( Main/Exploration ); précédent : 000399; suivant : 000401Structure and Dielectric Study of Poly(α,α difluoro‐p‐xylylene) Thin Films: Highlight of the Substrate Temperature Effect
Auteurs : Abdelkader Kahouli [France] ; Emmanuel André [France] ; Alain Sylvestre [France] ; Sébastien Pairis [France] ; Fathi Jomni [Tunisie] ; Béchir Yangui [Tunisie] ; Jean-Luc Garden [France]Source :
- Chemical Vapor Deposition [ 0948-1907 ] ; 2012-06.
Abstract
Research on poly(α,α difluoro‐p‐xylylene) thin films is described and summarized. The important physicochemical and dielectric properties are investigated. For this, characterization tools that can provide information on the nature of structural and physicochemical according substrate temperature are used. A summary of the main properties of poly(α,α difluoro‐p‐xylylene) is presented.
Url:
DOI: 10.1002/cvde.201204310
Affiliations:
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<front><div type="abstract" xml:lang="en">Research on poly(α,α difluoro‐p‐xylylene) thin films is described and summarized. The important physicochemical and dielectric properties are investigated. For this, characterization tools that can provide information on the nature of structural and physicochemical according substrate temperature are used. A summary of the main properties of poly(α,α difluoro‐p‐xylylene) is presented.</div>
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